Abstract: Aiming at the problems of low processing efficiency and poor consistency in the processing of reaction bonded silicon carbide surface texture by green silicon carbide multi-phase micro-abrasive jet machining, comparative experiments on multi-phase micro-abrasive jet machining of green silicon carbide with different jet angles were carried out, the effect of green silicon carbide with 4 kinds of particle sizes on the surface texture of the reaction bonded silicon carbide under different jet angles was investigated, and the effect mechanism of jet angle on the processing efficiency was discussed. The results show that the appropriate reduction of the jet angle can effectively improve the machining efficiency of the multi-phase micro-abrasive jet, and has the advantage of reducing the residual convex platform in the processing area.